Samsung plans to develop own smart sensor system for semiconductor management

Samsung is working for a brighter 2024 and doing its best in various fields meanwhile, recent information also suggests that the Korean tech giant also developing its own smart sensor system for semiconductor process control and management.

Samsung Electronics has established a plan to build an intelligent semiconductor production system through a smart process and develop it in-house to increase productivity, including cost reduction, and apply it to an actual mass production fab.

The sensor that is in work is ultra-small and is expected to be used without significantly affecting existing equipment space. It will be used to measure plasma uniformity for wafers.

The existing smart sensors for wafers, including the system, cost tens of millions of won, and most of them used foreign products. It is intended to accurately measure and manage the process performance of etching, deposition, and cleaning, which are core semiconductor processes.

As a strategy to increase semiconductor yield and productivity, existing foreign products are localized. In an attempt to build an intelligent semiconductor production system, it is expected to ultimately implement an ‘artificial intelligence fab’.

Via

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